Demonstration of submicron square-like silicon waveguide using optimized LOCOS process
نویسندگان
چکیده
منابع مشابه
Demonstration of submicron square-like silicon waveguide using optimized LOCOS process.
We demonstrate the design, fabrication and experimental characterization of a submicron-scale silicon waveguide that is fabricated by local oxidation of silicon. The use of local oxidation process allows defining the waveguide geometry and obtaining smooth sidewalls. The process can be tuned to precisely control the shape and the dimensions of the waveguide. The fabricated waveguides are measur...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.018592